EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD OF GENERATING EXTREME ULTRAVIOLET LIGHT

摘要

PROBLEM TO BE SOLVED: To enhance CE of an EUV (extreme ultraviolet) light generating device.SOLUTION: An extreme ultraviolet light source device may comprise: a laser beam generation system; a laser control system for controlling at least any one of optical intensity and output timing of at least one laser beam output from the laser beam generation system; a chamber having at least one incident port through which the at least one laser beam output from the laser beam generation system is introduced; and a target supply section provided on the chamber and supplying a target substance to a predetermined region in the chamber.