| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a support frame for a pellicle that reduces occurrence of haze even when high-energy light is emitted as much as possible and has high durability, a method of manufacturing the support frame, and the pellicle using the support frame for the pellicle. <P>SOLUTION: The support frame for pellicle to be used as a pellicle is made of aluminum material containing aluminum or aluminum alloy, has an optical thin film body on one side, and has an adhesion body on the end surface on the opposite side. The support frame for pellicle has a porous layer on the surface of the aluminum material, and the ratio of the pore diameter to the cell diameter (pore diameter/cell diameter) on the surface of the porous layer is within the range of 0.4-0.9. The pellicle is obtained by bonding the optical thin film body to one side surface of the support frame for pellicle. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
