TUNABLE THREE DIMENSIONAL INDUCTOR

摘要

A tunable three-dimensional (3D) inductor comprises a plurality of vias arranged with spacing among them, a plurality of interconnects in a metal layer, wherein the plurality of interconnects connect the plurality of vias on one end, and a plurality of tunable wires that connects to the plurality of vias on the other end to form the 3D inductor. The physical configuration and inductance value of the 3D inductor are adjustable by tuning the plurality of tunable wires during manufacturing process.

主权项

1. A method, comprising:
forming a plurality of vias in a substrate or a molding compound, wherein the vias are arranged with spacing among them; forming a metal layer wherein the interconnects of the metal layer connects the plurality of vias on one end of the vias; forming a plurality of wires to connect the plurality of vias on the other end of the vias to form a three-dimensional (3D) inductor; tuning one or more of the plurality wires to adjust the physical configurations and inductance value of the 3D inductor.