SOUNDPROOF COVER FOR CHARGED-PARTICLE BEAM DEVICE, AND CHARGED-PARTICLE BEAM DEVICE

摘要

It is an object of the present invention to provide a noise-proof cover and a charged particle beam apparatus that realize both of suppression of an image failure caused by a specific frequency and a reduction in size. To attain the object, the present invention proposes a noise-proof cover that surrounds a charged particle beam apparatus, the noise-proof cover including a hollow section forming member that forms a cylindrical body having a wall surface extending along an inner wall of the noise-proof cover, one end of the cylindrical body formed by the hollow section forming member being opened and the other end of the cylindrical section being closed, and the charged particle beam apparatus surrounded by the noise-proof cover.

主权项

1. A noise-proof cover for a charged particle beam apparatus that surrounds the charged particle beam apparatus, the noise-proof cover comprising a hollow section forming member that forms a cylindrical body having a wall surface extending along an inner wall of the noise-proof cover, wherein one end of the cylindrical body formed by the hollow section forming member being opened and the other end of the cylindrical section being closed.