| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique advantageous for achieving a function of exchanging components arranged in the internal space without opening a processing chamber to the atmosphere while suppressing the enlargement of a processor. <P>SOLUTION: A processing facility has the processor including the processing chamber for processing an article and the maintenance device including a maintenance chamber. The processor includes a load lock chamber for carrying the article into the processing chamber and carrying the article away from the processing chamber, the processing chamber includes a first valve and a first flange. The maintenance chamber includes a second valve, a second flange which can be connected to the first flange and cut off from the first flange, and a transfer mechanism for transferring the components between the internal space of the processing chamber and the internal space of the maintenance chamber. In the state that the first flange and the second flange are connected and the first valve and the second valve are opened, the internal space of the maintenance chamber and the internal space of the processing chamber are communicated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
