ANNULAR MEMBER AND FILM-FORMING DEVICE IN WHICH SAME IS USED

摘要

An annular member 10 according to an aspect of the invention surrounds the periphery of a substrate to be processed 2. The annular member 10 includes an annular main body 11 which is made of a ceramic sintered body or quartz glass, and has at least one main surface S1. The main body 11 has a groove portion G disposed on the main surface S1 and a plurality of projections 14 protruded from a bottom surface B of the groove portion G. A film forming apparatus 1 according to an aspect of the invention includes the annular member 10 and a reaction chamber 4 in which the annular member 10 is disposed, and which performs formation of a metal film 3 on the substrate to be processed 2. The groove portion G of the annular member 10 is exposed to the inside of the reaction chamber 4.

主权项

1. An annular member which surrounds the periphery of a substrate to be processed, comprising:
an annular main body which is made of a ceramic sintered body or quartz glass, and includes at least one main surface, wherein the main body includes a groove portion disposed on one main surface and a plurality of projections protruded from a bottom surface of the groove portion.