| 摘要 |
The invention relates to a method for producing a microelectromechanical transducer, comprising the following steps: producing a plurality of microelectromechanical transducers (1) on a single wafer (13), wherein each transducer (1) has a membrane (3), dividing the wafer (13) into at least a first and a second region (14, 15), determining the mechanical stresses of a random sample (18) of membranes (3) of the first region (14) and comparing said mechanical stresses with a specified target value, determining the mechanical stresses of a random sample (18) of membranes (3) of the second region (14) and comparing said mechanical stresses with the specified target value, adapting the stresses of the membranes (3) in the first region (14) to the specified target value, and adapting the stresses of the membranes (3) in the second region (15) to the specified target value. |
