ION IRRADIATION DEVICE, SECONDARY ION MASS SPECTROSCOPE, AND MASS SPECTROMETRY METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ion irradiation device for acquiring a secondary mass spectrum of sufficient intensity or a mass distribution image in a short time.SOLUTION: An ion irradiation device for irradiating a sample with an ion group includes an ion source for generating ions, and ion group selection means for selecting an ion group containing cluster ion from the ions emitted from the ion source. The ion source has pressure gradient formation means which temporarily changes the pressure for injecting the raw material of cluster ions. The ion group selection means has a chopper performing the chopping operation for screening the cluster ions to an ion group by opening and closing, thereby passing and intercepting the cluster ions in the traveling direction. The chopper performs the chopping operation twice or more per once of pressure gradient formation operation by the pressure gradient formation means.