发明名称 液体供給装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a liquid supply device by which the preset amount of liquid can be accurately coated by preventing delay time until the liquid is pushed out from a discharge port from start of pressurization. <P>SOLUTION: The liquid supply device includes: a syringe 1 having the liquid L which is discharged from the discharge port 53 thereof; and an on-off valve 2 which supplies the pressurized fluid from a fluid supply source to the syringe 1 in an open state to discharge the liquid L from the discharge port 53 and stops the supply of the fluid from the fluid supply source to the syringe 1 in a closed state. The fluid supply source is arranged and installed at a position separated from the syringe 1, and the fluid discharge port of the on-off valve 2 and the reverse discharge port side of the syringe 1 are connected to each other. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5666278(B2) 申请公布日期 2015.02.12
申请号 JP20100277972 申请日期 2010.12.14
申请人 发明人
分类号 H01L21/52;B05C5/00;B05C11/10 主分类号 H01L21/52
代理机构 代理人
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