| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an efficient and effective depolarization method for a ferroelectric by voltage application and a ferroelectric device which is multi-functionalized and high-functionalized by the depolarization method. <P>SOLUTION: Voltage is applied to a polarized ferroelectric and polarization inversion is performed. The piezoelectric level of the ferroelectric during the polarization inversion is detected to set a target dissipation level value of piezoelectricity based on the minimum value of the piezoelectric level. When the piezoelectric level reaches lower than the target dissipation level value during the polarization inversion of the ferroelectric, the voltage application to perform polarization inversion is stopped to depolarize the ferroelectric. By the depolarization, a ferroelectric device comprises residual strain, piezoelectric distortion, dielectric constant, polarization value, and elastic modulus, of the polarization state of a ferroelectric material, in addition to piezoelectric distortion, dielectric constant, polarization value, and elastic modulus of the depolarization state. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
