COLLECTION CHAMBER APPARATUS TO SEPARATE MULTIPLE FLUIDS DURING THE SEMICONDUCTOR WAFER PROCESSING CYCLE

摘要

The collection chamber apparatus acts to separate multiple fluids during the wafer processing cycle. Round, fluid collection trays surround the round wafer to collect each individual fluid, recycling them for later reuse. The trays move up and down by use of air cylinders and stack into each other to prevent cross contamination of the other fluids. Two opposing pistons (air cylinders) lift the trays in pairs to form fluid collection chambers. Each collection chamber has a unique drain which enters a separation manifold, flowing into separate tanks for later reuse.

主权项

1. A wafer processing system including a fluid collection apparatus configured to separate and collect multiple fluids for reuse during wafer processing comprising:
a rotatable wafer support member for supporting a wafer; a plurality of collections trays disposed about a peripheral edge of the wafer support member, the collection trays being arranged in a stacked configuration, each collection tray having a track section for collecting fluid and an outlet in fluid communication with the track section for discharging the collected fluid; and a means for selectively moving one or more of the collection trays to an elevated position above the wafer support member so as to define a collection chamber formed between at least two of the collection trays, the collection chamber being configured to collect fluid that is discharged from the wafer during the processing thereof and routes the collected fluid through the outlet of one of the collection trays.