| 摘要 |
<p>The present invention concerns an insulator coated conductive scanning probe comprising a holding part (1), an elastic part (2) arranged substantially parallel to a surface to be scanned, and a tip part (3) arranged on the free end of the elastic part (2) and being substantially perpendicular to the surface to be scanned, both the elastic part (2) and the tip part (3) having a conductive layer (4) with an end section (4.1) of the conductive layer on the tip part (3) of the probe being formed such as to have a substantially uniform cross-sectional configuration along the direction perpendicular to the surface to be scanned, the conductive layer (4) being covered by an insulating layer (5) except in the region of the apex (4.2) of the end section (4.1) of the conductive layer (4) on the tip part (3) of the probe. The insulating layer (5) on the scanning probe consists of an insulator coating formed by electron beam physical vapor deposition (EB-PVD). The invention also concerns a corresponding method of production as well as an adequate production device.</p> |
