| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an imprint device such that a mold can be efficiently released from a resin while suppressing the collapse of a pattern. <P>SOLUTION: The imprint device includes: a first driving mechanism that presses the mold against the resin applied to a substrate by driving at least one of a substrate stage and a mold stage along a (z) axis of an xyz coordinate system; a tilt driving mechanism that tilts at least one of the substrate stage and mold stage on a tilt axis of an xy plane of the xyz coordinate system; and a control unit that controls the first driving mechanism so as to separate the mold from the cured resin and also controls the tilt driving mechanism to continuously or intermittently change the direction of the tilt axis in the xy plane in at least a part of a releasing process of separating the cured resin from the mold by operating the first driving mechanism and tilt driving mechanism. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
