| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vibration measuring device and a vibration measuring method which can determine a position of a measurement target with a high precision inμ-meter order by using white light interferometry, further detect a vibration frequency of the measurement target at high speed in kHz order, and measure a vibration displacement amount in nanometer order. <P>SOLUTION: A vibration measuring device includes: a photo coupler which splits white light into reference light and measurement light; an optical element which changes an advancing direction of the reference light; a reflection element which inverts the advancing direction of the reference light; a reference light path length scanner which is composed of a direct moving stage which causes the optical element to reciprocate, and a scale head which acquires a position of the optical element; a sensor unit which is composed of a convergence lens which diverges or converges the measurement light, and a lens moving mechanism which moves the convergence lens; a photo detector which combines the reflected and returned reference light and the measurement light to output an interference signal; and a processor which analyzes a strength of interference signals acquired for a predetermined time through fast Fourier transforming processing, to determine a vibration frequency and a vibration displacement amount of a measurement target. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
