| 摘要 |
<p>An ultrasonic cleaning apparatus according to the present invention includes: a cooling fluid inlet which has a lower side facing an object to be cleaned and receives a cooling fluid, and a housing where a cooling fluid outlet part for discharging the received cooling fluid is formed; and a first transfer body which is received in the housing, a first piezoelectric element and a second piezoelectric element which is inclined to the upper side of the first transfer body and generates ultrasound, and a vibrator which includes a second transfer body which has an upper side closely fixed to the lower side of the housing and is combined with the lower side of the first transfer body, and is cooled by the cooling fluid received in the housing. Also, an ultrasonic cleaning system according to the present invention includes an ultrasonic cleaning apparatus; and a cleaning solution supplying unit which supplies a cleansing solution to an object to be cleaned.</p> |
