发明名称 SEMICONDUCTOR DEVICE WITH AIR GAP AND METHOD FOR FABRICATING THE SAME
摘要 Provided are a semiconductor device capable of reducing parasitic capacitance between adjacent conductive structures, and a method for fabricating the same. A semiconductor device according to the present technique may include bit line structures which include a bit line formed on a substrate; a first plug structure formed between the bit line structures; an air gap formed between the bit line structure and the first plug structure; a second plug structure which caps part of the air gap on the first plug structure; and a capping structure which caps the rest of the air gap.
申请公布号 KR20150015648(A) 申请公布日期 2015.02.11
申请号 KR20130091075 申请日期 2013.07.31
申请人 发明人
分类号 H01L21/764;H01L21/8242;H01L27/108 主分类号 H01L21/764
代理机构 代理人
主权项
地址
您可能感兴趣的专利