| 摘要 |
Disclosed are systems and methods for forming continuous laser filaments in transparent materials. Burst of high speed laser purses is focused so that a beam waist is formed on the outside of a material to be processed without an outer plasma channel, and forms sufficient energy density in an expanded area of a material to continuously form filaments without optical break in a material. The filaments formed by the method have lengths of more than 10 nm. In some embodiments, an ablative optical focusing element is used to generate an outer beam waist while incident beam in the material generates distributed focusing. Various systems for easily forming filament arrays in the transparent substrates to perform cleaving, singulation, or marking are disclosed. Optical monitoring of the filaments may be used to provide feedback facilitating activation control of process. |
