发明名称 Method and Apparatus for Manufacturing a Semiconductor
摘要 <p>A method and apparatus for crystallizing a semiconductor that includes a first layer having a first crystal lattice orientation and a second layer having a second crystal lattice orientation, comprising amorphizing at least a portion of the second layer, applying a stress to the second layer and heating the second layer above a recrystallization temperature.</p>
申请公布号 KR101489304(B1) 申请公布日期 2015.02.11
申请号 KR20080007248 申请日期 2008.01.23
申请人 发明人
分类号 H01L21/205;H01L21/324;H01L29/775 主分类号 H01L21/205
代理机构 代理人
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