用于清洁化学机械抛光后基板之组合物,申请号TW101130518-传众专利搜索

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发明名称	用于清洁化学机械抛光后基板之组合物
摘要
申请公布号	TWI472610	申请公布日期	2015.02.11
申请号	TW101130518	申请日期	2012.08.22
申请人	义凯西技术公司	发明人	大竹敦;伯纳提斯　保罗Ｒ;单　凯斯Ｘ
分类号	C11D3/36;B08B3/08;H01L21/306	主分类号	C11D3/36
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项	一种CMP后清洁组合物，其不含氮原子且包括至少一种氢氧化鏻之硷。
地址	美国

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