摘要 |
<p>The present invention relates to an optical switching device and a manufacturing method thereof. The optical switching element includes: a substrate including a trench; a lower cladding which includes an insulating material filling the inside of the trench; an optical waveguide formed on the lower cladding; a phase-transition pattern which is embedded on a part of the optical waveguide at the thickness of the optical waveguide; first and second slabs which are respectively formed on both side surfaces of the phase-transition pattern to be electrically connected to the phase-transition pattern; and an upper cladding which is formed on the substrate and the lower cladding to cover the optical waveguide, phase-transition pattern, and first and second slabs.</p> |