发明名称 a semiconductor device including metal interconnections and method for fabricating the same
摘要 Provided is a semiconductor device and a method for fabricating the same. The semiconductor device includes: a metal interconnection formed in a low dielectric layer; and a capping layer which includes a first part covering the upper side of the metal interconnection, and a second part covering the upper side of the low dielectric layer. The chemical composition of the first part of the capping layer may be different from the chemical composition of the second part of the capping layer.
申请公布号 KR20150015812(A) 申请公布日期 2015.02.11
申请号 KR20130091685 申请日期 2013.08.01
申请人 发明人
分类号 H01L21/28;H01L21/31;H01L21/3213 主分类号 H01L21/28
代理机构 代理人
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