发明名称 High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision
摘要 A high-frequency acceleration type ion acceleration and transportation apparatus is a beamline after an ion beam is accelerated by a high-frequency acceleration system having an energy spread with respect to set beam energy and includes an energy analysis deflection electromagnet and a horizontal beam focusing element. In the ion acceleration and transportation apparatus, a double slit that is configured by an energy spread confining slit and an energy analysis slit is additionally disposed at a position at which energy dispersion and a beam size are to be appropriate. The position is determined based on a condition of the energy analysis deflection electromagnet and the horizontal beam focusing element, and the double slit performs energy separation and energy definition and decreases the energy spread of the ion beam by performing adjustment for a smaller energy spread while suppressing a decrease in the amount of a beam current.
申请公布号 US8952340(B2) 申请公布日期 2015.02.10
申请号 US201414313128 申请日期 2014.06.24
申请人 SEN Corporation 发明人 Kabasawa Mitsuaki;Nishihara Tatsuo;Watanabe Kazuhiro;Takahashi Yuuji;Yamada Tatsuya
分类号 G21K1/08;H01J3/14;H01J3/26;H01J49/42 主分类号 G21K1/08
代理机构 Rader, Fishman & Grauer PLLC 代理人 Rader, Fishman & Grauer PLLC
主权项 1. A high-frequency acceleration type ion acceleration and transportation apparatus having high energy precision that is a beamline after an ion beam is accelerated by a high-frequency acceleration-type acceleration system having an energy spread with respect to set beam energy, the high-frequency acceleration type ion acceleration and transportation apparatus having high energy precision comprising: an energy analysis deflection electromagnet; and a horizontal beam focusing element, wherein a double slit that is configured by an energy spread confining slit and an energy analysis slit is additionally disposed at a position at which energy dispersion and a beam size are to be appropriate, wherein the position is determined based on a condition of the energy analysis deflection electromagnet and the horizontal beam focusing element, and wherein the double slit performs energy separation and energy definition and decreases the energy spread of the ion beam by performing adjustment for a smaller energy spread while suppressing a decrease in the amount of a beam current so as to realize required energy precision.
地址 Tokyo JP