Parameter variation improvement

摘要

Variation of a parameter of interest is reduced over a field of interest in, for example, an object design, such as a circuit design. The field of interest is divided into tiles. A parameter value is found for each tile and for a group of tiles around each tile. Using these values, variation of the parameter is determined. An adjusted value of the parameter for each tile is determined taking limits into account, iterating until variation is below a threshold value. Parameter uniformity is improved in some applications by over 30% with runtime reduced by an order of magnitude.

主权项

1. A computer-implemented method of reducing variation of a parameter of a circuit design comprising:
providing the circuit design to a computing device; identifying with the computing device a field of interest and a parameter of interest for the circuit design; dividing the field of interest into a plurality of tiles with the computing device; identifying a region around each tile in the plurality of tiles with the computing device such that a ratio of an area of the region to an area of the respective tile in the plurality of tiles is at least one hundred; determining with the computing device initial values of the parameter of interest for the field of interest and for each tile of the plurality of tiles; determining with the computing device a variation of the parameter of interest; adjusting the parameter of interest with the computing device based at least in part on the initial values of the parameter of interest for each tile and for tiles encompassed by the respective region around the respective tile, including determining a target value of the parameter of interest for each of the plurality of tiles using the initial values of the parameter of interest for each tile and for tiles encompassed by a region around the respective tile by finding a group average parameter value for each tile using the initial values of the tiles encompassed by the region around the respective tile, finding the target value by taking the group average parameter value into account and adjusting the parameter for each tile in accordance with the target value to reduce a standard deviation of the parameter for the respective tile, the target value including a first adjustment amount that is the lesser of:
a difference between the average parameter value over the entire field of interest and the group average parameter value for the respective tile, anda difference between a maximum allowable parameter value for the respective tile and the initial parameter value for the respective tile, modified by a first constant; comparing with the computing device the variation of the adjusted parameter of interest to an exit condition; storing in at least one of a memory or a non-transitory computer readable storage medium of the computing device the design in response to the variation satisfying the exit condition; and in response to the exit condition not being met, setting the adjusted values to the initial values with the computing device, and repeating with the computing device the steps of calculating, adjusting, and comparing until the exit condition is satisfied.