Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container

摘要

A barrier-film forming apparatus that forms a barrier film on an inner face of a container having a concave or convex portion as a processing target, including: a dielectric member having a cavity sized to enclose the container, an external electrode covering an outer circumference of the dielectric member, an exhaust unit installed on an end face of the external electrode on a side where a mouth of the container is located, with an insulating member interposed therebetween, and depressurizing inside of the container through an exhaust pipe, an internal electrode inserted from a side of the exhaust pipe and also serving as a gas blowout unit that blows out medium gas for generating a barrier film into the container, and an electric-field applying unit that applies an electric field for generating exhaust between the external electrode and a ground electrode.

主权项

1. A barrier-film forming apparatus for forming a barrier film on an inner face of a container, the barrier-film forming apparatus comprising:
an internal electrode provided with a gas flow channel through which medium gas is supplied to form the barrier film; an external electrode that is opened such that the internal electrode is inserted thereinto; and a dielectric member that is surrounded by the external electrode and configured to accommodate the container, the dielectric member having different relative permittivities (∈i) with respect to a permittivity in a vacuum, wherein the barrier-film forming apparatus is configured to meet a predetermined condition, and wherein the predetermined condition is defined by a value obtained by dividing a standard deviation of a sum of converted distances (di/∈i) at each point of the entire container by an average thereof, the converted distances (di/∈i) being obtained by dividing a thickness (di) of the dielectric member or a design clearance (di) between the external electrode and the container or between the dielectric member and the inner face of the container by the different relative permittivities (∈i) at each point of a surface of container from an inner surface of the external electrode to the inner face of the container, and the value is equal to or less than 0.75.