Apparatus with internal optical reference

摘要

An apparatus for inspecting a measurement object, comprising a workpiece support for supporting the measurement object and a measuring head carrying an optical sensor. The measuring head and the workpiece support are movable relative to one another. The optical sensor has an objective and a camera designed to capture an image of the measurement object. The objective has a light entrance opening and a light exit opening, and comprises a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective. Furthermore, the apparatus has a reflection element and a calibration arrangement. The reflection element can selectively be introduced into a beam path running from the measurement object through the objective to the camera. The calibration arrangement is coupled into the beam path to the camera by means of the reflection element.

主权项

1. An apparatus for inspecting a measurement object, comprising a workpiece support for supporting the measurement object and a measuring head carrying an optical sensor, wherein the measuring head and the workpiece support are movable relative to one another, wherein the optical sensor has a objective and a camera, which is designed to capture an image of the measurement object through the objective, wherein the objective has a light entrance opening and a light exit opening, wherein the objective has a multitude of lens-element groups which are arranged in the objective between the light entrance opening and the light exit opening one behind another along a longitudinal axis of the objective, and wherein the apparatus furthermore comprises a reflection element and a calibration arrangement, wherein the reflection element can selectively be introduced into a beam path running through the objective to the camera, in order to couple the calibration arrangement into the beam path to the camera by means of the reflection element.