| 摘要 |
An acceleration sensor according to the present invention includes a mass body which includes a first mass and a second mass, a frame which supports the first mass and the second mass, a first flexible part which connects the first mass and the second mass to the frame, respectively, and a second flexible part which connects the first mass and the second mass to the frame, respectively. The second flexible part is connected to the first mass and the second mass to be separated from the center of gravity of the first mass and the second mass. An acceleration sensor according to the present invention includes a mass part which includes a first mass and a second mass, an internal frame which supports the first mass and the second mass, respectively, a first flexible part which connects the first mass and the second mass to the frame, respectively, a second flexible part which connects the first mass and the second mass to the frame, respectively, an external frame which supports the internal frame, a third flexible part which connects the internal frame and the external frame, and a forth flexible part which connects the internal frame and the external frame. The first mass and the second mass is respectively connected to the internal frame so that it is eccentric by the second flexible part. |
