Laser processing method and laser processing apparatus

摘要

There is provided a laser processing method of a sapphire substrate including preparing a sapphire substrate on which plural stacked portions spaced from each other are formed, irradiating a short pulse laser beam from a laser light source, making the laser beam irradiated from the laser light source pass through a beam shaping module, adjusting a position of a light concentrating unit or the sapphire substrate such that the laser beam is concentrated to the inside of the sapphire substrate through the light concentrating unit, and forming a phase transformation area within the sapphire substrate by irradiating the laser beam into the sapphire substrate. The laser beam is introduced into the sapphire substrate while avoiding an area where the stacked portions are formed on the sapphire substrate, so that the phase transformation area is formed within the sapphire substrate.

主权项

1. A laser processing method of a sapphire substrate in a light emitting diode (LED) element comprising:
preparing a sapphire substrate on which plural stacked portions spaced from each other are formed; irradiating a short pulse laser beam from a laser light source; making the laser beam irradiated from the laser light source pass through a beam shaping module; adjusting a position of a light concentrating unit or the sapphire substrate such that the laser beam is concentrated to the inside of the sapphire substrate of the LED element through the light concentrating unit and a phase transformation area is formed within the sapphire substrate; and detecting photoluminescence light emitted by the stacked portions due to the laser beam, wherein the photoluminescence light is incident to a detection unit through a dichroic mirror provided between the laser light source and the light concentrating unit, and when the detection unit detects the photoluminescence light, the laser beam is controlled so as to be introduced into the sapphire substrate while avoiding an area where the stacked portions are formed on the sapphire substrate.