| 摘要 |
FIELD: chemistry.SUBSTANCE: method for plasma-chemical treatment of substrates made of polykor and glass-ceramic comprises preliminary wiping of articles with alcohol at all sides, including all faces of the substrate, preliminary blowing of the articles with a neutral gas, placing the articles in the chamber of a plasma apparatus along with a witness sample, cleaning the articles in an oxygen dominating medium at power of 500-600 W, process pressure of 800-900 mTorr for 10-20 minutes, verifying the quality of surface treatment from the witness sample by a limiting wetting angle method after cleaning.EFFECT: high quality of cleaning substrates made of polykor and glass-ceramic before sputtering, particularly removing oxide films and organic matter, shorter time and lower cost of cleaning.5 cl, 2 dwg |
