发明名称 Manufacturing apparatus for depositing a material and an electrode for use therein
摘要 A manufacturing apparatus and an electrode for use with the manufacturing apparatus are provided for deposition of a material on a carrier body. Typically, the carrier body has a first end and a second end spaced from each other. A socket is disposed at each end of the carrier body. The manufacturing apparatus includes a housing that defines a chamber. At least one electrode is disposed through the housing with the electrode at least partially disposed within the chamber for coupling to the socket. The electrode has an exterior surface having a contact region that is adapted to contact the socket. An exterior coating is disposed on the exterior surface of the electrode, outside of the contact region. The exterior coating has an electrical conductivity of at least 9×106 Siemens/meter and a corrosion resistance that is higher than silver in a galvanic series that is based upon room temperature sea water as an electrolyte.
申请公布号 US8951352(B2) 申请公布日期 2015.02.10
申请号 US200912937802 申请日期 2009.04.13
申请人 Hemlock Semiconductor Corporation 发明人 Hillabrand David;Knapp Theodore
分类号 H01L21/306;C23C16/50;C23F1/00;C23C16/00;H05B3/03;H01R13/00;C01B33/035;C23C16/44 主分类号 H01L21/306
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP
主权项 1. A manufacturing apparatus for deposition of a material on a carrier body having a first end and a second end spaced from each other with a socket disposed at each end of the carrier body, said apparatus comprising: a housing defining a chamber; an inlet defined through said housing for introducing a gas into the chamber; an outlet defined through said housing for exhausting the gas from the chamber; at least one electrode having an exterior surface having a contact region adapted to contact the socket, said electrode disposed through said housing with said electrode at least partially disposed within the chamber for coupling with the socket, wherein said electrode defines a cup with said contact region located within a portion of said cup; a power supply device coupled to said electrode for providing an electrical current to said electrode; an exterior coating disposed on said exterior surface of said electrode outside of said contact region, said exterior coating having an electrical conductivity of at least 9×106 Siemens/meter and corrosion resistance higher than silver in a galvanic series based upon room temperature seawater as an electrolyte; and a contact region coating disposed on the contact region and comprising a single, uniform composition that is distinct from the exterior coating, the contact region coating consisting of silver.
地址 Hemlock MI US
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