Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

摘要

A thin film deposition apparatus including a deposition source having a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed at a side of the deposition source along a first direction and having a plurality of nozzle slits to discharge the deposition material that was vaporized; a plurality of emission coefficient increasing units disposed toward the nozzle unit within the deposition source and increasing a quantity of motion of the deposition material that is discharged toward the nozzle unit; a patterning slit sheet disposed opposite to the nozzle unit and having a plurality of patterning slits arranged along the first direction; and a barrier plate assembly disposed between the nozzle unit and the patterning slit sheet along the first direction, and having a plurality of barrier plates that partition a space between the nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.

主权项

1. A thin film deposition apparatus comprising:
a deposition source comprising a crucible to contain a deposition material and a heater to heat and vaporize the deposition material; a nozzle unit disposed at a side of the deposition source extending in a first direction and comprising a plurality of nozzle slits to discharge the vaporized deposition material; a plurality of emission coefficient increasing units comprising piezo-oscillation plates, the emission coefficient increasing units being located within the crucible and facing the nozzle unit and configured to increase motion of the vaporized deposition material toward the nozzle unit, a central axis of oscillation of the piezo-oscillation plates being aligned with centers of the plurality of nozzle slits, respectively; a patterning slit sheet opposite to the nozzle unit and comprising a plurality of patterning slits arranged along the first direction; and a barrier plate assembly between the nozzle unit and the patterning slit sheet, the barrier plate assembly comprising a plurality of barrier plates arranged along the first direction and partitioning a space between the nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces.