Surface modification, functionalization and integration of microfluidics and biosensor to form a biochip

摘要

The present disclosure provides methods of fabricating a biochip. The biochip includes a fluidic part, having through-substrate holes as inlets and outlets, and a sensing part bonded together using a bonding material. One or both of the parts has microfluidic channel patterns and one or more patterned surface modification layers formed using different methods to provide surface property for binding bioreceptors and for flowing analytes. The patterning includes lithography, etching, washing, selective depositing using printing or self-assembly of surface chemistry.

主权项

1. A method of manufacturing a biochip, comprising:
providing a fluidic substrate; depositing a surface modification layer over the fluidic substrate; forming a bonding material pattern on the fluidic substrate; forming through-holes in the fluidic substrate; providing a sensing wafer having one or more modified surface patterns having different surface properties; bonding the sensing wafer and the fluidic substrate via the bonding material.