| 摘要 |
<p>The present invention relates to a precise anodization apparatus to manufacture a nano-oxide emitter which includes a chamber accommodating an electrolyte inside; a cathode power connection terminal disposed at a lower portion inside the chamber and being cathodic; an anode power connection terminal penetrated and coupled to an upper portion of the chamber, and being anodic; a test piece for a field emitter fixed by a fixer disposed at a lower portion of the anode power connection terminal, and electrically connected to the anode power connection terminal; and a linear stage connected to an upper portion of the anode power connection terminal to control the height of the anode power connection terminal in order to control the length in which the test piece and the cathode power connection terminal are separated, such that the anode and cathode are parallel, and the distance between the two electrodes is accurate, thereby manufacturing a nano-oxide emitter having a uniform oxide film.</p> |
