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发明名称
DEFLECTION PLATE AND DEFLECTION DEVICE FOR DEFLECTING CHARGED PARTICLES
摘要
A deflection plate for deflecting charged particles, the plate comprising a recess is provided.
申请公布号
KR20150015028(A)
申请公布日期
2015.02.09
申请号
KR20147037095
申请日期
2012.06.01
申请人
发明人
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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