| 摘要 |
<p>The present invention relates to a magnetic sensor testing device on a wafer which is used to test a multi-axis magnetic sensor in a wafer mode and a method thereof. The method includes the steps of; arranging a coil generating a magnetic field on a wafer including the magnetic sensor to detect the multi-axis magnetic field; applying the magnetic field to the magnetic sensor by using the coil; and detecting the magnetic field applied to the magnetic sensor. The size of the coil is smaller than that of the wafer, and the magnetic sensor is arranged in the coil area while being spaced apart from the center of the coil by a certain distance. Accordingly, the present invention can reduce the size and number of the coils and the current required to generate the magnetic field. The present invention can also reduce the test cost and time.</p> |
