发明名称 PROCESS FOR FORMING AN ELECTROACTIVE LAYER
摘要 <p>There is provided a process for forming a layer of electroactive material having a substantially flat profile. The process includes the steps of providing a workpiece having at least one active area; depositing a liquid composition including the electroactive material onto the workpiece in the active area, to form a wet layer; treating the wet layer on the workpiece at a controlled temperature in the range of−25 to 80° C. and under a vacuum in the range of 10−6 to 1,000 Torr, for a first period of 1-100 minutes, to form a partially dried layer; and heating the partially dried layer to a temperature above 100° C. for a second period of 1-50 minutes to form a dried layer.</p>
申请公布号 KR101491877(B1) 申请公布日期 2015.02.09
申请号 KR20107028057 申请日期 2009.05.15
申请人 发明人
分类号 H01L21/208 主分类号 H01L21/208
代理机构 代理人
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