| 摘要 |
<p>The present invention relates to a grating and an infrared spectrometer. The driven micro-grating includes: multiple thin-films which are made of an infrared-reflective material and are deformed as being applied with power; a thin-film support frame which has the thin-films arranged on the surface to fix both ends of the thin-films respectively; multiple support beams which are vertically arranged below the thin-films; and a support frame which fixes the lower ends of the support beams and is capable of moving upward and downward. The driven micro-grating can precisely deform according to the deformation position without making a voltage circuit go through a conventional strain-voltage correction process for each mirror to control the position of the thin-film mirrors. Accordingly, the present invention can implement a gas spectrum more precisely according to a mirror depth profile reproduction more precise than that of a conventional grating.</p> |
