发明名称 MANUFACTURING METHOD OF BUFFER LAYER FOR THIN-FILM SOLAR CELL USING ELECTROMAGNETIC WAVE
摘要 <p>The present invention relates to a method for manufacturing a buffer layer of a compound thin-film solar cell using electromagnetic waves. The present invention deposits a buffer layer using a dielectric-heating method of electromagnetic waves, instead of using a circulator-based heat-delivering method which is a heat supplying method of conventional chemical bath deposition. As a result, the present invention can increase the temperature of a solution in a chemical bath quickly and uniformly, thereby reducing process time, and in addition, can evenly supply heat to a substrate for the deposition, thereby quickly depositing a high-quality thin film on the substrate.</p>
申请公布号 KR101488202(B1) 申请公布日期 2015.02.06
申请号 KR20140139016 申请日期 2014.10.15
申请人 发明人
分类号 H01L31/042;H01L31/06;H01L31/18 主分类号 H01L31/042
代理机构 代理人
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