MEMS GYROSCOPE

摘要

A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised plurality of movable portions that are capable of moving in response to angular velocity and a plurality of magnetic sensing mechanisms for measuring movements of the movable portions.

主权项

1. A MEMS gyroscope, comprising:
a first substrate, comprising:
a plurality of movable portions, each of which is movable in response to an external angular velocity, wherein at least a pair of proof-masses move in opposite directions in response to said angular velocity;a plurality of magnetic sources for said movable portions for generating magnetic fields; and a second substrate having a plurality of magnetic sensors fir detecting the magnetic fields from said magnetic sources.