发明名称 ELECTROMAGNETIC-RADIATION POWER-SUPPLY MECHANISM AND MICROWAVE INTRODUCTION MECHANISM
摘要 <p>An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.</p>
申请公布号 KR101490572(B1) 申请公布日期 2015.02.05
申请号 KR20127020891 申请日期 2011.01.14
申请人 发明人
分类号 C23C16/511;H01L21/3065;H01P5/08;H05H1/46 主分类号 C23C16/511
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