Optical Switching Devices Including Phase Transition Materials

摘要

An optical switching device includes a substrate having an optical waveguide thereon, and a phase transition pattern in or on a portion of the optical waveguide. The phase transition pattern includes a material that is configured to be switched between insulating and conductive states responsive to a stimulus. At least one conductive element on the substrate directly contacts the phase transition pattern to provide the stimulus to the phase transition pattern. Related fabrication methods are also discussed.

主权项

1. An optical switching device comprising:
a substrate comprising a trench therein; a lower cladding layer comprising an insulating material in the trench; an optical waveguide on the lower cladding layer; a phase transition pattern buried within a part of the optical waveguide and having a same thickness as a thickness of the optical waveguide; first and second slabs at sides of the phase transition pattern and electrically connected to the phase transition pattern; and an upper cladding layer on the substrate and the lower cladding layer and on the optical waveguide, the phase transition pattern, and the first and second slabs.