发明名称 IMPEDANCE MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an impedance measuring device that does not require a complicated tuning operation.SOLUTION: A measurement auxiliary circuit 11 is constituted so as to form a resonance circuit 12 together with an object 2. An ATAC 10 is coupling to the resonance circuit 12. A signal generator 13 applies an AC probe signal Vto the resonance circuit 12. An impedance detection unit 16 measures a voltage of at least one node and/or a current of at least one path in a state where an impedance measuring device 1 is stable, and detects an impedance of the object 2 on the basis of a measurement value.
申请公布号 JP2015025791(A) 申请公布日期 2015.02.05
申请号 JP20130157019 申请日期 2013.07.29
申请人 ADVANTEST CORP 发明人 ENDO YUKI;FURUKAWA YASUO;UEDA TOMOAKI
分类号 G01R27/02 主分类号 G01R27/02
代理机构 代理人
主权项
地址