| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump including one pump inlet, one pump outlet, one rotor rotatable around a rotating shaft, at least one process gas pump stage for transferring a process gas generated at the pump inlet from the pump inlet to the pump outlet, one motor space, and one driving motor having one motor stator disposed in the one motor space and constituted to rotate and drive the rotor.SOLUTION: At least one gas path for a process gas is extended through a motor space at least partially along a motor stator at a part of the motor starter, or extended through the motor stator from a pump inlet to a pump outlet. |
