| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxime sulfonate compound that gives a photosensitive resin composition having high sensitivity, excellent storage stability, excellent transparency of a cured film, and wide development latitude.SOLUTION: The oxime sulfonate compound is expressed by formula (2), formula (3) or formula (4) shown below. In formulae (2) to (4), Rrepresents an alkyl group, an aryl group or a heteroaryl group; Reach independently represents a hydrogen atom, an alkyl group, an aryl group or a halogen atom; Reach independently represents a halogen atom, alkyl group, alkyloxy group, sulfonate group, aminosulfonyl group or alkoxysulfonyl group; X represents O or S; n represents 1 or 2; m represents an integer of 0 to 6; and in two or more of Rpresent in the compound, at least one represents an alkyl group, an aryl group or a halogen atom. |
