| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample base capable of inhibiting warpage and cracks of a sample in a load lock chamber.SOLUTION: A sample base 201 of a load lock chamber has a split structure composed of a sample base center part 301 and a sample base outer periphery part 302. The sample base center part 301 is made of a material having heat conductivity higher than the outer periphery part 302 or the sample base center part 301 is provided with a cooling gas passage 303 to bring the sample base center part 301 into a state that its temperature is lower than the sample base outer periphery part 302. A center part of a sample 120 is cooled quicker than an outer periphery part of the sample 120 with the structure.</p> |
