INTEGRATED CIRCUIT DEVICE

摘要

An integrated circuit device includes a semiconductor substrate, an active element and a passive element. The active element is made of the semiconductor substrate. The passive element includes a functional element filled in a groove or hole provided in the semiconductor substrate along a thickness direction thereof and is electrically connected to the active element. The functional element has a Si—O bond region obtained by reacting Si particles with an organic Si compound.

主权项

1. An integrated circuit device comprising a semiconductor substrate, an active element and a passive element,
the active element being made of the semiconductor substrate, the passive element including a functional element filled in a groove or hole provided in the semiconductor substrate along a thickness direction thereof and being electrically connected to the active element, the functional element having a Si—O bond region obtained by reacting Si particles with an organic Si compound.