METHOD FOR PRODUCING A PRESSURE SENSOR AND CORRESPONDING SENSOR

摘要

The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the centre thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

主权项

1. A manufacturing method of a pressure sensor comprising the following steps:
assembly (E1) of a support substrate (10) with a deformable membrane (20) on which strain gauges (30) have been deposited, the deformable membrane comprising a thinned zone (20b) in its centre, the support substrate (10) being arranged above the deformable membrane (20), the support substrate (10) comprising an upper surface (101), a lower surface (102) in contact with the deformable membrane (20), the support substrate (10) further comprising lateral recesses (11) arranged above the strain gauges (30) and a central recess (50) arranged above the thinned zone (20b) of the membrane (20), to obtain a micromechanical structure; and once the assembly is complete the method comprising the following step: deposit (E2) in a single step of at least one conductive material (60) on the upper surface (101) of the support and in the lateral recesses (11) of the support (10), the conductive material (60) extending into the recesses (11) to be in contact with the strain gauges (30) to form electrical contacts (61) linked to the strain gauges (30).