| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a detector capable of achieving high detection sensitivity by effectively transferring light generated in a scintillator to a photodetector.SOLUTION: A detector 100 detects a scattered charged particle beam EBscattered by a sample with an irradiation of a charged particle beam and allowing a transmitting charged particle beam EBtransmitting through the sample to pass therethrough. The detector includes: a scintillator 10 provided with a first through hole 12 for passing the transmitting charged particle beam EBand converting the scattered charged particle beam EBinto light; a pipe section 20 allowing light generated in the scintillator 10 to enter through a first opening to be emitted through a second opening; a light guide 30 for guiding light emitted through the second opening; and a photo-detection section 40 for detecting light guided by the light guide 30. A second through hole 26 for passing the transmitting charged particle beam EBtherethrough is provided in the pipe section 20.</p> |
