Pressing Force Sensor

摘要

A pressing force sensor that includes a flat membrane piezoelectric element and a support. The flat membrane piezoelectric element includes a piezoelectric sheet having a piezoelectric constant d14. A first electrode is formed on a first main surface of the piezoelectric sheet and a second electrode is formed on a second main surface thereof. Long directions of the first electrode and the second electrode and a uniaxial stretching direction of the piezoelectric sheet form an angle of 45°. An opening portion having an elliptical section is formed on the support. The flat membrane piezoelectric element abuts the opening portion of the support. The support and the flat membrane piezoelectric element are disposed such that the opening portion is included within an area of the second electrode.

主权项

1. A pressing force sensor comprising:
a piezoelectric sheet having a first main surface and a second main surface which are opposed to each other; a first electrode on the first main surface; a second electrode on the second main surface; and a support abutting the second main surface side of the piezoelectric sheet, wherein the support defines a space sized so as to allow deformation of at least a part of the second electrode, and the piezoelectric sheet and the support are disposed such that distortion caused by an external force to the piezoelectric sheet over the space differs in two directions which are orthogonal to each other.