| 摘要 |
Provided is a prober wherein a probe head can be easily replaced. A prober (10) is provided with: a main body (12); a stage (11), which is disposed in the main body (12), and which has a wafer (W) placed thereon; a probe card (16), which is disposed in the main body (12), and which faces the stage (11); and a probe head holder (24), which is disposed in the main body (12), and which is capable of moving toward the probe card (16). The probe card (16) has a probe head (30), which can be attached to and detached from the probe card (16), and which has a plurality of probe needles (35) disposed thereon, and the probe head holder (24) moves toward the probe card (16) by holding the probe head (30). |
