发明名称 |
Microelectromechanical system and methods of use |
摘要 |
<p>Methods of measuring displacement of a movable mass in a microelectro- mechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase.</p> |
申请公布号 |
AU2013274681(A1) |
申请公布日期 |
2015.02.05 |
申请号 |
AU20130274681 |
申请日期 |
2013.05.31 |
申请人 |
PURDUE RESEARCH FOUNDATION |
发明人 |
CLARK, JASON V. |
分类号 |
B81B7/00;G01C19/56;G01P15/00 |
主分类号 |
B81B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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